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Article cité :

New trends in PBII technology: industrial perspectives and limitations

J Pelletier, F Le Coeur, Y Arnal, A Lacoste and A Straboni
Surface and Coatings Technology 136 (1-3) 7 (2001)
https://doi.org/10.1016/S0257-8972(00)01001-X

Determination of the EEDF by Langmuir probe diagnostics in a plasma excited at ECR above a multipolar magnetic field

T Lagarde, Y Arnal, A Lacoste and J Pelletier
Plasma Sources Science and Technology 10 (2) 181 (2001)
https://doi.org/10.1088/0963-0252/10/2/308

Ion implantation by plasma immersion: interest, limitations and perspectives

F. Le Cœur, J. Pelletier, Y. Arnal and A. Lacoste
Surface and Coatings Technology 125 (1-3) 71 (2000)
https://doi.org/10.1016/S0257-8972(99)00554-X

Advanced Technologies Based on Wave and Beam Generated Plasmas

J. Pelletier, T. Lagarde and Y. Arnal
Advanced Technologies Based on Wave and Beam Generated Plasmas 97 (1999)
https://doi.org/10.1007/978-94-017-0633-9_4

Distributed electron cyclotron resonance plasma immersion for large area ion implantation (invited)

F. Le Coeur, T. Lagarde, J. Pelletier, Y. Arnal, R. Burke and M. Brunel
Review of Scientific Instruments 69 (2) 831 (1998)
https://doi.org/10.1063/1.1148530

Influence of the multipolar magnetic field configuration on the density of distributed electron cyclotron resonance plasmas

T Lagarde, J Pelletier and Y Arnal
Plasma Sources Science and Technology 6 (1) 53 (1997)
https://doi.org/10.1088/0963-0252/6/1/008

Ion velocity distribution function observations in a multipolar argon discharge

G. Bachet, L. Chérigier and F. Doveil
Physics of Plasmas 2 (5) 1782 (1995)
https://doi.org/10.1063/1.871328

Multipolar magnetic field structures for the scaling-up of high density plasmas excited in the d.c. to microwave frequency range and applicable to sputtering and chemical processing

J. Pelletier, T. Lagarde, Y. Arnal, R. Burke and J. Cocagne
Surface and Coatings Technology 76-77 770 (1995)
https://doi.org/10.1016/0257-8972(95)02609-6

Experimental investigation of ion-acoustic double-layers in the electron flow across multidipole magnetic fields

J L Ferreira, G O Ludwig and A Montes
Plasma Physics and Controlled Fusion 33 (4) 297 (1991)
https://doi.org/10.1088/0741-3335/33/4/003

Investigation of a plasma source sustained by an electromagnetic surface wave at 2.45 GHz under free-fall regime

A Durandet, Y Arnal, J Margot-Chaker and M Moisan
Journal of Physics D: Applied Physics 22 (9) 1288 (1989)
https://doi.org/10.1088/0022-3727/22/9/008

Microwave multipolar plasmas excited by distributed electron cyclotron resonance: Concept and performance

M. Pichot, A. Durandet, J. Pelletier, Y. Arnal and L. Vallier
Review of Scientific Instruments 59 (7) 1072 (1988)
https://doi.org/10.1063/1.1139728