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Latent image characterization of postexposure bake process in chemically amplified resists
L. E. Ocola, F. Cerrina and Tim May Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 15(6) 2545 (1997) https://doi.org/10.1116/1.589682
Infrared synchrotron radiation: Introduction and history
An infrared synchrotron radiation beamline on DAΦNE
E. Burattini, G. Cappuccio, A. Marcelli, et al. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 347(1-3) 308 (1994) https://doi.org/10.1016/0168-9002(94)91899-6
Design of an instrument for far-infrared microspectroscopy using a synchrotron radiation source
A. Ugawa, H. Ishii, K. Yakushi, H. Okamoto, T. Mitani, M. Watanabe, K. Sakai, K. Suzui and S. Kato Review of Scientific Instruments 63(1) 1551 (1992) https://doi.org/10.1063/1.1143017
Infrared synchrotron radiation instrumentation and applications
The initial scientific program at the NSLS infrared beamline
G.P. Williams Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 291(1-2) 8 (1990) https://doi.org/10.1016/0168-9002(90)90025-2
Far-infrared spectroscopy by synchrotron radiation at the UVSOR Facility
Takao Nanba, Yasuhito Urashima, Mikihiko Ikezawa, et al. International Journal of Infrared and Millimeter Waves 7(11) 1769 (1986) https://doi.org/10.1007/BF01010075
Some possible effects modifying the far infrared synchrotron radiation spectrum