RHEED and REM study of Si(111) surface degradation under Ar bombardment A. Claverie, J. Faure, C. Vieu, J. Beauvillain et B. JouffreyJ. Phys. France, 47 10 (1986) 1805-1812DOI: https://doi.org/10.1051/jphys:0198600470100180500
